Zeiss EVO-10 High-Resolution Scanning Electron Microscope

The Evo-10 is a tungsten emission system with three lens electron optics. The system configuration includes a Everhart-Thornley Secondary Electron (ETSE) detector for high vacuum imaging, a 310 mm (diameter) x 220 mm (height) chamber, a 5-axis motorized stage, and a SmartSEM control software. The instrument can perform at a 0.2-30 kV accelerating voltage range with a highest resolution of 3.0 nm. The EVO-10 includes a high-definition 5-segment, Si dioded-based Back Scattered Electron (BSD) detector for material contrast imaging, and a SmartEDAX detector with integrated APEX software for X-ray microanalysis. The variable pressure (VP) option and a fourth generation variable pressure SE detector enable high-resolution imaging at low acceleration voltages. This instrument was purchased with financial support from the MRI program of the National Science Foundation under Award DMR- 1828038.